Purification technology and equipment development and application trends

Clean technology is also known as the production environment and pollution control technology, is the last two or three decades together with the high-tech development of a comprehensive new science and technology. Specializing in clean technology and offers a variety of high-purity media environment and clean production processes used in the production process, effective control of trace impurities, in order to ensure the yield of high-tech products and can be *. Clean technologies typically include: air purification technology, air conditioning technology, water purification technology, gas purification technology, trace impurities control, monitoring technology clean environment and related environmental quality control technology. Decontamination technology has been widely used in the high-tech industry and modern science and electronics, nuclear, aerospace, biotechnology, pharmaceuticals, precision machinery, chemicals, food, automobile manufacturing and the like.
For the semiconductor equipment is concerned, decontamination technology plays a very important role in microelectronics. Core microelectronics technology is integrated, and the production of integrated circuits made strict requirements of its technology environment and processes of purification technology and equipment. Efforts to develop the information industry as the focus of microelectronics in China During the "Ninth Five." Decontamination technical level, in a sense has become a measure of an important symbol of national and regional scientific and technological level and industry level.
With the improved living standards of our people, the environment and quality of life of people living increasingly high demand, high pure water purification equipment preparation has been widely welcomed, decontamination technology has begun to enter millions of households, into people's modern life .
 Our clean technology and equipment compared with foreign advanced countries, the gap is obvious, of 1965 began production of HEPA filters, fifteen years later than abroad. 1975 to begin production of light scattering particle counter twenty years later than abroad. 0.1 micron clean technology and equipment in the international advanced countries has become a mature technology, while China has just started.
 All industrially advanced countries of the world to adapt to the development of clean technology, the extensive use of high efficiency filter research has never been interrupted for several years has been the development of different structures of different performance of new products, the United States since 1979, started to develop 0.1-micron ULPA filter, in 1984 the United States AAF company began production of 0.1 micron pleat ULPA filter, currently 0.1 micron ULPA filter AAF company in the United States, FLANDERS company and CAMBRIDGE company has formed commercial production. Japan has become the world's production of 0.1 micron ULPA filter manufacturers most countries, variety, serialization of products, especially low loss type 0.1-micron ULPA filter is developed to solve the large initial resistance technical problems. International market demand for high efficiency air filter is large, and have increased every year, currently Japan's annual sales of over one million units, according to the average price of $ 200 for each calculation, with sales of $ 200 million. Our high efficiency air filter market demand is close to 10 million units per year, accounting for 2% to 4% of the international market, but has yet to produce 0.1-micron ULPA filter for VLSI production of clean plant and various 0.1 micron ULPA filter clean plant high-tech sector is now also rely on imports.
In the clean room construction scale and technical level, the gap between China and advanced countries more. Shimizu, a Japanese construction company, the construction period 1982 to 1987 the clean room area of ​​718,000 square meters, while the total area of ​​the clean room is less than the current year, the construction of 100,000 square meters, but there are relatively Eighth Five-Year period big development, in 1993 the total area of ​​the clean room close to Cheng Jianjie 150,000 square meters. Cleanroom construction of larger American, 1998 Statistics reached 1.885 million square meters. On clean engineering technical level, the late 1980s, a large number of foreign countries have been completed and 0.1 micron clean room, 1987 Niigata Sanyo factory built ten clean plant 3,000 square meters, NIT timber is built four 1,000 square feet m Control 0.1 micron dust one thousand plants, ventilation frequency up to 300 beats / min. US TSMCS new plant in Taiwan has built the fourth generation of pipeline clean room with a total area of ​​10,000 square meters. 0,1 micron ten clean room used in China mainly rely on imports from abroad. Because of high purity grade clean room cost is very expensive, 0.1 micron ten clean room cost up to $ 10,000 per square meter. LSI manufacturing equipment investment in clean plant occupies a very high proportion, which is continuously updated integrated circuit technology, product life cycles and faster incompatible trends, severely restricted the LSI technology development of. US ASYST, Germany MW using isolation technology company developing sub-micron production of micro-environmental systems equipment and technology has been widely adopted in recent years. The latest clean technology in 100 clean room cleanliness, the use of process equipment for topical use isolation techniques microenvironment, the compression ratio of investment to high-level micro-environment, eliminate the secondary pollution operator and process equipment operation impact on the role of IC yield and can be * of.
International market clean technologies and equipment is enormous, Japan to the late 80s, early 90s clean technology and equipment sales have exceeded $ 3.5 billion. Sales in the United States and Western Europe and other advanced countries clean equipment and infrastructure components has reached $ 7.3 billion. According to the China Electronic Production Equipment Industry Association statistics, sales of China's major eight largest purification plant in 1990 to 82.17 million yuan, less than 100 million, in 1993 reached 144.95 million yuan, accounting for 0.34% of the international market sales . But with the rapid development of China's high-tech and microelectronics industry, optical industry, the development of liquid crystal display industry and optoelectronic devices industry, biotechnology, pharmaceutical industry, China's potentially huge market for clean technology products, with 40% to 50% per year The growth rate increased.

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